nano tech 2018: Seminar explores latest Gray Scale research work with the DWL 2000

Tokyo, Japan, February 6, 2018: This year marked the 17th edition of nano tech, the world’s premier nanotechnology exhibition, which was organized in Tokyo, Japan. Heidelberg Instruments joined over five hundred organizations from 24 countries and showcased its cutting-edge Maskless Aligner and Direct Write Laser Lithography systems.

Professor Kentaro Totsu, renowned researcher at the Tohoku University and the Deputy Director of the Micro System Integration Center, held a seminar outlining some of the current research in Gray Scale Lithography using the DWL 2000 Laser Lithography System, a high-resolution pattern generator designed and manufactured by Heidelberg Instruments. The Gray Scale Lithography is achieved by irradiating laser beam on a layer of thick positive. The amplitude of the laser beam and the position of the substrate are precisely controlled, simultaneously, by the system. Micro optical components, such as micro-lens arrays, micro-Fresnel lenses, and gratings are example of the gray scale lithography. During the presentation, a series of fabrication steps including gray scale file preparation, sample preparation, laser exposure, development, evaluation, and improvement of surface roughness of the photoresist was introduced.

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About Heidelberg Instruments:  With an installation base of over 800 systems in more than 52 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high-precision maskless lithography systems.  Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

About Micro System Integration Center, Tohoku University: The Micro System Integration Center (μSIC) works with industrial partners and other collaborators to advance the state of technology development for micro system integration, targeting practical applications in a wide variety of fields ranging from information and communications systems to manufacturing and medical technology.

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Heidelberg Instruments GmbH


Phone: +49 6221 3430 0

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