Heidelberg Instruments presents new VPG+ platform at workshop in Japan

Heidelberg, Germany, April 4, 2017: Heidelberg Instruments GmbH (HIMT), a leader in the design, development, and production of maskless lithography systems, is exhibiting at the Photomask Japan 2017 (5th to 7th of April 2017 in Yokohama). We will also be giving a conference talk designed to introduce exciting upcoming instrument developments: this presentation, entitled “SLM based Semiconductor Mask Writer”, is scheduled for April 6th at 10:20 am in the “Writing” session. In addition, HIMT is organizing a customer workshop to take place in the course of the conference – at this company event, we will launch the new high-speed, high-performance VPG+, which represents the upgraded incarnation of the successful VPG (Volume Pattern Generator) product line.

During the past ten years, the VPG has become an industry standard for large scale patterning, both in its small area version (accommodating substrate sizes up to 200 mm or 400 mm square in size) and the large area instruments (for substrate sizes up to 800, 1100 or 1400 mm square respectively). The VPG+ series now features a significantly faster spatial light modulator, custom-made for Heidelberg Instruments. The data path and the complete optical engine have been overhauled: now super-fast and extra high-powered in order to securely accommodate the enhanced data flow.  At the new maximum speed, an exposure with the VPG+ can be completed up to three times as fast as with the original VPG.

About Heidelberg Instruments, GmbH:  With an installation base of over 750 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high-precision laser and maskless lithography systems. Some of the most prestigious universities and industry leaders use these powerful and flexible systems: in research, development and industrial applications for direct writing and photomask production. Heidelberg Instruments laser lithography systems are employed in the areas of MEMS, BioMEMS, nanotechnology, ASICS, TFT, displays, micro optics, and many other related applications.

Heidelberg Instruments GmbH
Phone: +49 6221 3430 0

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