Heidelberg Instruments GmbH receives order for a large area laser lithography system
Heidelberg, Germany, April 5, 2018: Heidelberg Instruments, a leader in design, development and production of laser lithography and Maskless Aligner systems, announced order for an advanced VPG+ 1400 laser lithography system from a photomask production group in Japan.
The VPG+ series of Volume Pattern Generators utilizes the latest innovations in software, electronics and optics. The custom designed, high-speed spatial light modulator enables unmatched exposure speed and excellent image quality. The VPG+ 1400 stands out even among the other members of the powerful VPG+ family, with its formidable environmental chamber, an interferometer with a resolution down to 1.2 nm, and advanced mura correction capabilities. This system is designed particularly for applications in the display industry; FPD applications, such as TFT-arrays and color filters. It can pattern sub-micron structures (with an address grid down to 12 nm) on up to 1.4 by 1.5-meter substrates.
“The latest VPG+1400 is another milestone in innovation by Heidelberg Instruments. With its wide range of capabilities, this tool will enable our customers to work on a number of applications, including production of photomasks for the display industry,” states Alexander Forozan, VP of Sales and Business Development.
About Heidelberg Instruments: With an installation base of over 800 systems in more than 52 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high-precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments GmbH
Phone: +49 6221 3430 0