Heidelberg Instruments delivers high-resolution DWL 66+ lithography system to NASA’s Goddard Space Flight Center in Greenbelt, MD, USA

Heidelberg, Germany/Boston, MA, USA, November 17, 2017: Heidelberg Instruments Mikrotechnik GmbH, the leading supplier of maskless optical lithography systems, is proud to announce the delivery of a DWL 66+ direct write lithography system with the high-resolution mode to NASA’s Goddard Space Flight Center in Greenbelt, Maryland.

The high-resolution mode allows the user to pattern features down to 300nm features size. It is one of several new features and options introduced to the DWL 66+ this year. Other new options introduced in 2017 include a new high-throughput mode, a precision package and automatic substrate handling.  

Niels Wijnaendts van Resandt, Heidelberg Instruments Director of Sales for North America, states:

“The adoption of our tool in such a prestigious laboratory highlights the continued popularity of our Lithography systems in the research community. The introduction of the new High-Resolution Mode makes the DWL 66+ even more attractive and proves our aim to continuously improve our tools.”

About Heidelberg Instruments, GmbH:  With an installation base of over 800 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in the production of high-precision laser and maskless lithography systems. Due to their flexibility, power and versatility, these systems are employed for direct writing and photomask production in a wide range of settings and applications in research, development, and industry. Customers include some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, nanotechnology, ASICS, TFT, displays, micro optics, and many other related applications.

About NASA's Goddard Space Flight Center: Located in Greenbelt, Maryland, NASA's Goddard Space Flight Center is home to the nation's largest organization of scientists, engineers and technologists who build spacecraft, instruments and new technology to study Earth, the sun, our solar system and the universe.

Heidelberg Instruments GmbH
Phone: +49 6221 3430 0

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