Large Area Stage Systems

In the last two decades Heidelberg Instruments Mikrotechnik has achieved an impressive expertise in high precision, large area stage systems.  Originally designed and intended for internal usage in our Maskless Lithography Systems, custom-designed stage systems are currently offered for demanding applications such as material processing, exposure systems, metrology as well as other areas where positioning and precision are of outmost importance.

The stage systems are based on our unique air bearing technology and can be equipped with interferometric measurement system with a resolution down to 1 nm. Powerful linear motors allow rapid speed and acceleration while maintaining high position accuracy.  

For additional information please contact us.