Application Notes

Read our latest application notes about Heidelberg Instruments vast range of applications. Written by our engineers or our customers, these articles describe the technology, performance and capabilities of our products.

NEW in March 2019: "High-resolution direct-write laser lithography with the Heidelberg Instruments DWL 66+" shows beautiful examples of features created with the HiRes-Mode on DWL 66+: Channel waveguides and ring resonators, a waveguide spiral delay line, and a MEMS comb drive actuator.

 

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Title
Keywords
Relevant Products
thin resist thick resist
MLA150
thick resist
µPG 101, DWL 66+, MLA100, MLA150
grayscale
DWL 66+, DWL 2000
thin resist, lift-off
MLA100, MLA150, µPG 101, DWL 66+