Small Area Volume Pattern Generators
VPG+ 200 and VPG+ 400
NEW: The successful VPG (Volume Pattern Generator) family – with an installation base of more than 50 worldwide – has evolved once more. Since its inception, the VPG product line has continuously been improved further as technology advanced. The newly integrated high-speed spatial light modulator now represents a quantum leap in performance – a development that is reflected in an upgraded product name: VPG+.
The Small Area VPG+: The best of both worlds
Our VPG+ systems are available in versions for small and large area exposures. All of them share the same powerful technology. The VPG+ 200 and VPG+ 400 are Heidelberg Instruments’ most advanced small and midsize high-speed exposure systems. While their principle of operation is based on the technology employed by the company’s large area VPG platforms, they also benefit from our vast experience in small area lithography.
Even faster: Ultra-high-speed exposure!
The VPG+ series now features an even faster high-speed spatial light modulator, custom made for Heidelberg Instruments and therefore exclusive to the VPG+. At the new maximum speed, an exposure can be completed up to three times as fast as with the original VPG! The entire exposure engine and the data path have been vastly enhanced.
Features and options: Equipped for performance
The VPG+ small area systems feature a high power pulsed UV laser source with a wavelength of 355 nm. The air-bearing stages are capable of accommodating substrates up to 400 x 400 mm2 or 800 x 800 mm2 in size, respectively. Systems are equipped with an automated alignment capability and an integrated metrology system.
Applications: Photomask fabrication and direct writing
The VPG+ 200 and VPG+ 400 combine high resolution and outstanding image quality with high speed and, consequently, fast throughput. All this makes them the ideal systems for rapid photomask fabrication, as well as for a plethora of other direct write applications, especially those that use i-line resists such as SU-8 or IP 3600. The systems can be used in a variety of demanding fields that require microstructures. Typical applications include MEMS, advanced packaging, 3D integration, LED production, life science, and compound semiconductors.