Large Area Volume Pattern Generators
VPG+ 800, VPG+ 1100 and VPG+ 1400
NEW: The successful VPG (Volume Pattern Generator) family – with an installation base of more than 50 worldwide – has evolved once more. Since its inception, the VPG product line has continuously been improved further as technology advanced. The newly integrated high-speed spatial light modulator now represents a quantum leap in performance – a development that is reflected in an upgraded product name: VPG+.
The Large Area VPG+: The cutting edge of technology
The large area VPG+ builds on the hugely successful VPG and makes it even better. The VPG was introduced back in 2007; a line of large area lithography systems based on a patented vast exposure process parallelization. Since then, the VPG has represented the industry standard, reliable and economical solution for demanding photomask fabrication.
Even faster: Ultra-high-speed exposure!
The VPG+ series now features an even faster high-speed spatial light modulator, custom made for Heidelberg Instruments and therefore exclusive to the VPG+. At the new maximum speed, an exposure can be completed up to three times as fast as with the original VPG! The entire exposure engine and the data path have been vastly enhanced.
Features and options: Equipped for performance
The VPG+ can be configured with various stage dimensions designed to accommodate substrate sizes up to 1400 mm x 1400 mm. The systems feature a UV laser source at a wavelength of 355 nm, an air-bearing stage, semi or fully automatic feeder for substrate loading and state-of-the-art environmental chambers.
Applications: Photomask fabrication and direct writing
Large area VPG+ systems are perfectly equipped for applications in photomask fabrication for advanced packaging, semiconductors, displays, color filters, light emitting diodes, touch panel applications and also life science. With their excellent image quality and registration, they are also ideally suited to any type of direct writing of individual layers on large areas.
A system apart: The VPG+ 1400
Our largest system, the VPG+ 1400, is specifically aimed at and optimized for applications in the display industry: the most formidable of all VPG+s, it features an extremely powerful environmental chamber, a differential interferometer and advanced mura correction with panel pitch optimization.