Ultimate Lithography Production Tools
Introduced in 2007 and based on a patented vast exposure process parallelization, the Volume Pattern Generator (VPG) line of large area lithography systems is now the industry standard, reliable and economical solution ideal for high volume production of today’s demanding photomasks in electronic packaging, color filters, light emitting diode, touch panels, as well as direct writing for individual layers on large areas with excellent image quality and registration.
The VPG can be configured with various stage dimensions designed to accommodate substrate sizes of 800 mm x 800 mm, 1100 mm x 1100 mm and 1400 mm x 1400 mm. These systems can be equipped with air-bearing stage, semi or fully automatic feeder for substrate loading, and a UV laser source with an output of up to 10W. Smaller write grid ensures excellent edge roughness and stripe butting. The 2-D Stage Map Correction is an automatic calibration tool enabling excellent registration and positioning of written structures.
The main applications for the large area VPG systems include Photomask Fabrication for Advanced Packaging, Semiconductor, Displays, Life Science and other fields which require high resolution micro structures.