Heidelberg Instruments to support micro and nano research at the Institute of Microelectronics, China.
Heidelberg Instruments expands further into the Chinese Market with sale of a VPG 800 Maskless Lithography System
Heptagon Corporation selects Heidelberg Instruments advanced Gray Scale Lithography System for Production of Micro Optics
Heidelberg Instruments GmbH receives multiple orders for advanced VPG maskless lithography systems from Asia
Heidelberg Instruments to support micro and nano research at the University of Minnesota Nanofabrication Center (NFC)