Address

Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Germany
Phone: (+49) 6221 34 30 0
Fax:     (+49) 6221 34 30 30
Mail:
Web: www.himt.de

Stage System

The stage system holds the substrate and moves it in the x-y plane during the exposure. The main components are the drive section, the chuck and the interferometer system. The drive section uses linear or DC motors – depending on the system type - to move the stage in the x- and y-direction, while the chuck holds the substrate and secures it in place through vacuum. During the exposure the position of the stage is constantly monitored by an interferometer system with a resolution of 10 nm. This way any remaining position offset during the exposure can be compensated through an online beam correction, which is done by the optical system.

DWL66FS Stage DWL 4000 Stage
DWL66FS Stage DWL 4000 Stage

A newly developed stage system setup offers superior stability for our larger systems. This new concept relies on air bearings and linear motors for quieter running of the stage, minimizing any remaining vibrations and distortions and making it possible to write large area masks with excellent structure quality and uniformity.