Key Features and Options

  • Substrates up to 100 x 100 mm2
  • Structures down to 1 µm
  • Address grid down to 40 nm
  • Vector and Raster exposure mode
  • 3D exposure mode
  • Standard or UV laser source
  • Multiple data input formats (DXF, CIF, BMP)
  • Camera system for alignment

Download Fact Sheet µPG 101
[pdf / 1.2 MB]

µPG 101- The Tabletop Laser Pattern Generator

µPG 101

For fast and easy micro pattern writing

Pattern

Pattern

Pattern

The µPG 101 is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. It basically works like a desktop printer with a resolution of 250,000dpi - just design your microstructures and press the print button. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high resolution microstructures.

The standard system is equipped with a diode laser at 405 nm, which presents a reliable laser source with a long lifetime. This laser can be used to expose the standard photoresists that are used in lithography. Alternatively, the system can be equipped with a laser diode at 375 nm, making it possible to expose standard resists and UV resists like SU8.

For additional information please Download the Fact Sheet or Contact us anytime.