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up to date with the latest business news from our site. Southwest Jiaotong University, China, to adapt Heidelberg Instruments’ technology for advanced MEMS and Micro Optics fabrication
Heidelberg, Germany, December 16, 2008: Heidelberg Instruments announced the sale of an advanced DWL 66FS maskless laser lithography system to the Southwest Jiaotong University, located in Chengdu, China. System will be used for fabrication of MEMS and micro optic devices.
The DWL 66FS maskless lithography system is capable of binary and gray scale exposure, layer to layer alignment, and is able to produce minimum features down to 0.6 microns.
About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Contact: Britta Abler
Web: www.himt.de