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up to date with the latest business news from our site. Heidelberg Instruments to support micro and nano research at several Japanese based research facilities
Heidelberg, Germany, August 26, 2009: Heidelberg Instruments announced the sale of multiple µPG101 table top maskless patterning systems to several public and private institutions in Japan.
The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing high resolution features with an address grid of 40nm.
The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system. Applications include MEMS, BioMEMS, Integrated Optics, Micro Fluidics, µTAS, or similar areas requiring microstructures.
About Heidelberg Instruments, GmbH: With an installation base of more than 350 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Contact: Diana Hack
Web: www.himt.de