Heidelberg Instruments to support micro and nano fabrication activities at the 4D Labs, Simon Fraser University
Heidelberg, Germany, August 05, 2009: Heidelberg Instruments announced the sale of an advanced DWL 66FS maskless laser lithography system and a µPG101 Table Top Lithography System to the 4D labs at the Simon Fraser University, Canada.
4D LABS is an advanced materials research center at Simon Fraser University (SFU) in British Columbia, Canada. The goal of this research centre is to unite chemists, physicists, and engineers from multiple disciplines to design, develop, demonstrate, and deliver the next generation of materials solutions for clean energy, information, and health care technologies.
The integration of cross-disciplinary researchers, industrial researchers, and graduate students allows for the collaborations necessary to tackle projects that none can do alone. A Visiting Researcher’s Laboratory provides the space to facilitate these collaborations. 4D LABS is attractive to both academic and industrial researchers due to the flexible IP policies of SFU and the available expertise of researchers and staff within this materials research centre.
“The key aspect of this centre is the 4,500 square foot Class 100 Clean Room with Class 1 environments. 4D LABS offers state-of-the-art equipment in nano- and micro-fabrication. Researchers are able to fabricate and analyze their materials and devices in one location with a seamless integration of techniques critical to expedite breakthroughs in research. The most recent addition to this arsenal of techniques is a direct write laser lithography system from Heidelberg Instruments µPG101 that can pattern micrometer scale features and perform grey scale and 3D lithography. Included is a DWL 66FS maskless laser lithography system also from Heidelberg Instruments, that can pattern photolithography masks with sub-micrometer to millimeter scale features. Researchers using the facilities in 4D LABS will now be able to rapidly pattern nano- and microstructures and directly write features within their materials.” states Dr. Byron Gates, Assistant Professor and Canadian Research Chain in Surface Chemistry
About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Contact: Diana Hack
Web: www.himt.de