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Latest News

Heidelberg Instruments supplies multiple maskless lithography systems to the Air Force Institute of Technology

Heidelberg, Germany, May 27, 2010:  Heidelberg Instruments announced the sale of multiple µPG101 Table Top Lithography Systems to the Air Force Institute of Technology, USA.

The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing high resolution features with an address grid of 40nm.

About Heidelberg Instruments GmbH:   With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems.  These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Heidelberg Instruments, GmbH
Contact: info@himt.de