Stay
up to date with the latest business news from our site. Heidelberg Instruments announced the sale of an advanced DWL66 fs maskless laser lithography system to the National Institute for Research and Development in Microtechnologies, Romania
Heidelberg, Germany, December 12, 2006: Heidelberg Instruments announced the sale of an advanced DWL66 fs maskless laser lithography system to the National Institute for Research and Development in Microtechnologies, Romania.
The DWL66 fs maskless lithography system is capable of binary and grey scale exposure, layer to layer alignment, and is able to produce minimum features down to 0.6 microns.
“The DWL66fs Laser Lithography System represents an important upgrade for the mask manufacturing facilities from IMT. This system is very important for our institute which is involved in many European Projects and bilateral cooperation and will help IMT to act as a national center in mask manufacturing for academic purposes, including in cooperation in European programs. Also, grayscale technology will allow us to develop different RFMEMS, MOEMS and BIOMEMS 3D structures by direct writing into photoresist on the different substrates (silicon, III-V compounds, glasses etc). We are very happy to have the chance to use this system which will offer us new opportunities for our fields of interest.” Prof. Dan Dascalu, General Manager of IMT, Member of the Romanian Academy.
About IMT: The National Institute for Research and Development in Microtechnologies (IMT-Bucharest), established in 1993, was first institute from the Eastern Europe having as main objective the field of microtechnologies. Its mission is to develop human capital and to transform technology through innovative research. Main efforts and develop activities of our research groups are: 1. Nanostructured materials, nanotechnologies and nanostructures; 2. Microstructures and micro-nanosystems for sensing applications; 3. Micro/nanostructures for biomedical applications; 4. Microstructures and MEMS and MOEMS for communications
About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Alexander Forozan
VP, Sales and Marketing
Email: alexander.forozan@himt.de
Web: www.himt.de