Heidelberg Instruments Mikrotechnik GmbH

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Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Germany
Phone: (+49) 6221 34 30 0
Fax: (+49) 6221 34 30 30
Mail:
Web: www.himt.de

Links - Technology

Here you can find some interesting links regarding the technologie used in Heidelberg Instruments lithography systems:

Type	Description	Link
	Lasers - Toptica	Click here
	Lasers - Coherent	Click here
	Photoresist - MicroChemicals	Click here
	Photoresist - micro resist technology	Click here

Here you can find some interesting links to publications and applications related to Heidelberg Instruments lithography systems:

Type	Description	Link
	A miniaturized glow discharge applied for optical emission detection in aqueous analytes	Click here
	A one-step protocol for the chemical derivatisation of glass microfluidic devices	Click here
	Continuous real-time bubble monitoring in microchannels using refractive index detection	Click here
	Fabrication and characterization of polymeric optical waveguides using standard silicon processing technology	Click here
	Ion Channel Sensor on a Silicon Support	Click here
	Nanostructuring of organic and chalcogenide resists by direct DUV laser beam writing	Click here
	On-demand neural probes	Click here
	SU 8 multiple layer structuring by means of maskless photolithography	Click here
	Producing Patterns on a Curve	Click here
	A maskless laser-write lithography processing of thin-film transistors on a hemispherical surface	Click here
	Design, Fabrication, and Characterization of a Microgripper Device	Click here

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