DOWNLOADS

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Address

Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Germany
Phone: (+49) 6221 34 30 0
Fax:     (+49) 6221 34 30 30
Mail:
Web: www.himt.de

Product information / Factsheets

Here you can download the factsheets from our product-line, describing the systems and their features:

Type File Name File Size
pdf-file Internal Factsheet µPG 101 1.2 MB
pdf-file Internal Factsheet DWL 2000 1.4 MB
pdf-file Internal Factsheet DWL 66 FS 1.3 MB
pdf-file Internal Factsheet DWL 4000 1.3 MB
pdf-file Internal Factsheet DWL 8000 1.3 MB
pdf-file Internal Factsheet VPG 1600 1.3 MB

Publications

Here you can download scientific publications related to Heidelberg Instruments and their lithography systems. You can find additional links to publications here:

Type File Name / Description File Size
pdf-file External Electromagnetic materials – availability and spectral coverage of a new class of micro/ nanofabricated composite materials 260 KB
pdf-file External Industrial applications of micro/ nanofabrication at Singapore Synchrotron Light Source 330 KB
pdf-file External Integrated free-space optical interconnect fabricated in planar optics using chirped microlens arrays 1.0 MB
pdf-file External Laser Direct Write Grayscale Photolithography 200 KB
pdf-file External Laser-Lithographie für Mikrooptik auf gekrümmten Oberflächen 220 KB
pdf-file External Laser-lithography on non-planar surfaces 670 KB
pdf-file External Micro- and Nano-Fabrication of Electromagnetic Metamaterials for the Terahertz Range 520 KB
pdf-file External Microfluidics for lab-on-a-chip applications 1.8 MB
pdf-file External Micromirror for Laser-Beam Scanning for Robotics and Other Applications 1.5 MB
pdf-file External Precise temperature control in microfluidic devices using Joule heating of ionic liquids 230 KB
pdf-file External Selective etching of chalcogenides and its application for fabrication of diffractive optical elements 180 KB
pdf-file External Three-Dimensional Modeling of Mechanical Forces in the Extracellular Matrix during Epithelial Lumen Formation 570 KB
pdf-file External On-demand neural probes 250 KB
pdf-file External Design, Fabrication, and Characterization of a Microgripper Device 1.2 MB
pdf-file External Thick-film lithography using laser write 2.5 MB
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