Address

Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Germany
Phone: (+49) 6221 34 30 0
Fax:     (+49) 6221 34 30 30
Mail:
Web: www.himt.de

Publications

Due to their flexibility, the Heidelberg Instruments maskless lithography systems are used in research facilities around the world for a broad variety of scientific applications. They often play an important role in the realization of cutting edge experiments, which result in publications in the literature as well as in scientific conferences.

To provide an overview of the possible application we have collected a sample of Publications and Links related to scientific work that was done with the assistance of Heidelberg Instruments systems.