Adresse

Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Deutschland
Tel.: (+49) 6221 34 30 0
Fax: (+49) 6221 34 30 30
Mail: Kontakt aufnehmen
Web: www.himt.de

Laserquellen

The Heidelberg Instruments laser lithography systems can be equipped with a variety of different laser sources, making it possible to adjust the system to specific applications. The common laser sources have a wavelength between 363 nm and 442 nm, therefore standard resists used in lithography processes can be exposed with the systems. Lasers with a longer or shorter wavelength can be implemented in the systems, for special applications and resists.

If possible, the systems will be equipped with a solid state diode laser, which enables high quality exposures and is the most economical laser due to its long lifetime. High power gas laser are used for fast exposure systems or for low sensitive photo resist that requires high intensities for exposure. Due to the modular setup of our systems it very easy to implement one of the common laser sources as well as a customer specific lasers.