Heidelberg Instruments Mikrotechnik GmbH
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TECHNOLOGIE
Adresse
Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Deutschland
Tel.: (+49) 6221 34 30 0
Fax: (+49) 6221 34 30 30
Mail: 
Web: www.himt.de
Klimakammer
For high quality exposures it is necessary to provide an extremely stable environment for the systems. Variations in the temperature or air turbulences would influence the optical performance and the interferometer system or create position inaccuracies due to thermal expension of the substrate. Especially for high resolution and long time exposures the environmental stability is important.
Our systems are therefore enclosed by an environment chamber, which provides a stable temperature and laminar air flow. Any remaining variations in the environmental conditions are registered and compensated by software through the optical exposure system. The different system each have an individually designed chamber for optimal performance.
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| DWL 2000 | VPG 1600 |