Adresse

Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Deutschland
Tel.: (+49) 6221 34 30 0
Fax: (+49) 6221 34 30 30
Mail: Kontakt aufnehmen
Web: www.himt.de

Erfahrung

to build high resolution maskless laser lithography systems is the result of a long period of experience collected in this area. After about 5 years in an academic environment, followed by 17 years in an industrial environment, we have learned to master the various tools to build such highly complex systems. Heidelberg Instruments employs dedicated people with knowledge in the area of optics, precision mechanics, laser technology, high speed digital and analog electronics, software in various levels, image processing and recognition, and many more. After more than 17 years of using our systems, we have application and processing experience in many different fields. Therefore, if a customer purchases a lithography tool, he or she does not only obtain a high performance pattern generator but also a wealth of knowledge to apply the system.

Our system combine economical cost of ownership with very high precision and reliability, which is achieved in a number of ways:

  • By using error tolerant systems completely controlled and corrected by software. This concept relaxes the need for extremely precise mechanical systems. It also reduces the cost of some critical components. However, we do not save on metrology systems. All our stages use interferometers as a position measurement tool. The extreme resolution of these systems in combination with some proprietary procedures allows us to correct in real-time for a large number of imperfections.
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  • By carefully considering, analyzing and compensating for the effect of environmental fluctuations on our systems.
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  • By distributed software solutions. This means that we do not have a single master program running the system. A number of dedicated tasks organized by a very reliable, industrial and real-time operating system. The user software can be adapted in the field by an application engineer to respond directly to the needs of the user.
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  • By including a wealth of metrology and diagnostic functions allowing the systems to be calibrated and qualified without the need for external tools.
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  • By using off the shelf components as much as possible. The consequence is that we can quickly integrate the most modern technology in our systems. Only very few components are specially produced for our applications.
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  • By remaining a medium size company, avoiding complex and costly management structures and distributing responsibility down the line to the to application engineer working with the customer, helps the customer be productive.

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For further information please kontaktieren us.