to build high resolution maskless laser lithography systems is the
result of a long period of experience collected in this area. After
about 5 years in an academic environment, followed by 17 years in
an industrial environment, we have learned to master the various tools
to build such highly complex systems. Heidelberg Instruments employs
dedicated people with knowledge in the area of optics, precision mechanics,
laser technology, high speed digital and analog electronics, software
in various levels, image processing and recognition, and many more.
After more than 17 years of using our systems, we have application
and processing experience in many different fields. Therefore, if
a customer purchases a lithography tool, he or she does not only obtain
a high performance pattern generator but also a wealth of knowledge
to apply the system.
Our system combine economical cost of ownership with very high precision
and reliability, which is achieved in a number of ways:
- By using error tolerant systems completely controlled and corrected
by software. This concept relaxes the need for extremely precise
mechanical systems. It also reduces the cost of some critical components.
However, we do not save on metrology systems. All our stages use
interferometers as a position measurement tool. The extreme resolution
of these systems in combination with some proprietary procedures
allows us to correct in real-time for a large number of imperfections.
- By carefully considering, analyzing and compensating for the effect
of environmental fluctuations on our systems.
- By distributed software solutions. This means that we do not have
a single master program running the system. A number of dedicated
tasks organized by a very reliable, industrial and real-time operating
system. The user software can be adapted in the field by an application
engineer to respond directly to the needs of the user.
- By including a wealth of metrology and diagnostic functions allowing
the systems to be calibrated and qualified without the need for
- By using off the shelf components as much as possible. The consequence
is that we can quickly integrate the most modern technology in our
systems. Only very few components are specially produced for our
- By remaining a medium size company, avoiding complex and costly
management structures and distributing responsibility down the line
to the to application engineer working with the customer, helps
the customer be productive.
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