Merkmale und Ausstattung

  • Substrates up to 100 x 100 mm2
  • Structures down to 1 µm
  • Address grid down to 40 nm
  • Vector and Raster exposure mode
  • 3D exposure mode
  • Standard or UV laser source
  • Multiple data input formats (DXF, CIF, BMP)
  • Camera system for alignment
  • Software development kit

Download Datenblatt Download Datenblatt µPG 101
[pdf / 1.2 MB]

µPG 101- Das kompakte Lithographie- System

µPG 101

For fast and easy micro pattern writing

Muster

Muster

Muster

The µPG 101 is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. It basically works like a desktop printer with a resolution of 250,000dpi - just design your microstructures and press the print button. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high resolution microstructures.

For additional information please Download the Fact Sheet or kontaktieren us anytime.