Heidelberg Instruments to support one of the largest Japanese companies in MEMS research
Heidelberg, Germany, August 20, 2007: Heidelberg Instruments announced the sale of an advanced DWL 200 maskless laser lithography system to the one of the largest Japanese based companies. System will be used in various research areas, including the MEMS based sensor technology.
The DWL 200 system will enable the user to expose sub micron structures on photoresist, with an active write area of up to 200 mm by 200 mm.
About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Britta Abler
Email: britta.abler@himt.de
Web: www.himt.de