Heidelberg Instruments Mikrotechnik GmbH

Heidelberg, Germany, December 20, 2006: Heidelberg Instruments announced the sale of an advanced DWL200 maskless laser lithography system to the Middle East Technical University, Turkey. The DWL200 system will enable the user to expose minimum structures on photoresist down to 0.6 microns, with an active write area of up to 200 mm by 200mm.

“METU-MEMS facilities are capable of 4″ and 6″ wafer processing and being used to develop a number of MEMS products for commercial applications, including CMOS-based ultra low-cost infrared detector arrays, piezoresistive and capacitive pressure sensors, humidity sensors, and bulk micromachined gyroscopes and accelerometers. DWL200 system will accelerate the prototype development cycle and will also allow the facility to be used as a MEMS foundry for external users for prototype development and small volume fabrication.” states Prof. Dr. Tayfun AKIN of METU

About Heidelberg Instruments GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Heidelberg Instruments, GmbH
Alexander Forozan
VP, Sales and Marketing
Email: alexander.forozan@himt.de
Web: www.himt.de